采用表面微加工技术制造微型行星齿轮减速器

中文字数:3066,中文页数:4   英文字数: 2099页数:8

MICRO PLANETARY REDUCTION GEAR USING SURFACE-MICROMACHINING
Abstract
 A micro planetary gear mechanism featuring a high gear reduction ratio with compactness in size ispresented in this paper. SUMMiT V is employed for the fabrication method so that the redundancy of assembling parts is eliminated. The design rules of which has also been checked. To make full use of the benefits of the surface- micro - machining,  the planetary reduction gear is designed toward using the on-chip micro- engine. The expected gearreduction ratio is calculated and compared with the conventional chain gear mechanism. The microplanetary gear mechanism presented in this paper is expected to have 162:1 reduction ratio utilizing less space consumption. This is an order of magnitude higher than the previously reported design in a single reduction gear train.
Keywords:MEMS, planetary gear, reduction gear surface-micromachining,  SUMMiT V process

采用表面微加工技术制造微型行星齿轮减速器
摘要
 这篇文章论述了一种结构紧凑、传动比高的微型行星齿轮减速机构。这种机构的加工方法采用桑迪亚国家实验室研发的过度平面的多极微机电系统技术去除整体结构的冗余部分，而且这种设计原理已经得到承认。为了充分利用表面微加工技术，我们在设计加工这种行星减速齿轮时，需要使用安装在芯片上的微电机。我们将计算这种齿轮预期的减速比，并把它与传统的链传动和齿轮传动相比较。在这篇论文中演示的微行星轮占用较少的空间，消耗较少的材料，减速比却有望达到162：1。这比以前的论文中设计的减速器的传动比要高的多，简直是一个神话。
关键字：微机电  行星齿轮  减速器   表面微加工   过度平面的多极微机电系统的加工（简称为SUMMiT V）

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