非球面测量技术研究

车辆工程专业毕业论文，论文编号:JX914  论文字数:15621.页数:37

摘     要
　 所谓非球面光学元件，是指面形由多项高次方程决定、面形上各点的半径均不相同的光学元件。非球面镜属于特殊表面，它具有许多独特的性质。如二次曲面在恰当的共轭位置没有球差，将非球面用于光学系统中，能够减少系统中光学元件的数量或能提高成像质量。随着光学精密加工的发展，非球面越来越广泛地应用于各种光学系统中，如:高品质的照相机、摄像机、各种光学测量仪器、扫描仪等。尤其是天文领域,大型的天文望远镜主要是由非面镜构成。非球面的应用所遇到的困难主要是,非球面的加工，现代光学加工技术的发展，球可以加工出高品质的非球面镜。尽管目前发展出多种非球面的检测技术，但对于某些形式的非球面仍然不能有一个行之有效的测量方法，所以非球面的检测技术是制约非球面发展的主要因素。以下文章从非球面的面形描述和光学性质出发，对分别从三坐标测量法，激光扫描法，光的干涉法进行分析，对其进行优缺点的对比。 
  
关键词：三坐标测量法，激光扫描法，光的干涉法 

Abstract
 The so-called non-spherical optical elements, is the face and decided by the number of high-order equation, the surface shape on the radius of the points are not the same optical components. Aspheric surface is special, it has many unique properties. Such as quadratic surfaces location is not appropriate conjugate spherical aberration, will be used for non-spherical optical system, the system can reduce the number of optical components or to improve the image quality. With the development of optical precision machining, non-spherical surface more and more widely used in various kinds of optical systems, such as: high-quality camera, video camera, a variety of optical measuring instruments, scanners, etc.. especially the areas of astronomy, a large telescope is mainly constituted by non-spherical mirrors. the application of non-spherical main difficulties encountered is that the processing of non-spherical, modern optical processing technology, can process high-quality aspherical lens. Although the development of a variety of non-spherical detection technology, but for some forms of non-spherical still can not have a well-established measurement method, so the detection of non-spherical non-spherical constraining the development of the main factors. The following article describes non-spherical surface shape and optical properties of the components, respectively, from the coordinate of the measurement, laser scanning and optical interference method to analyze the advantages and disadvantages compared to their conduct.
 
Keywords: CMM, laser scanning, optical interferometry.
 
目  录
 摘     要 1
 Abstract 2
 目  录 3
 第一章 绪论 5
1.1设计目的与意义 5
1.2国内外发展现状 5
1.3论文內容概述 6
 第二章 三坐标测量法 8
2.1 Form Talysurf表面轮廓仪 8
 第三章激光扫描法 9
3.1三维激光扫描技术背景及系统组成 9
3.2三维激光扫描技术原理 9
3.3便携式激光扫描三维形貌测量系统 11
 3.3.1测量系统结构分析 11
 第四章 剪切干涉法 13
4.1条纹扫描剪切干涉仪的光学系统 13
 4.1.1 棱镜式横向剪切干涉仪的光学系统图 14
 4.1.2条纹扫描剪切干涉测量原理 14
 4.1.3数据采集及高压控制 15
4.2测量及数据处理过程 16
 4.2.1 干涉圈的自动采集 16
 4.2.2 计算各采样点位相 16
 4.2.3 求披谢波面相对最适球面的偏差 16
 4.2.4计算相对于非球面设计值之差 17
 4.2.5测量例 17
4.3横向剪切条纹扫描干涉仪 18
4.4径向剪切干涉仪 19
 第五章 移相式同步剪切干涉仪的推导 22
5.1 移相式同步剪切干涉仪的设计 23
 5.1.1 激光器 23
 5.1.2 分束镜的设计 24
 5.1.3 偏振片 24
 5.1.4雅敏输入平板的设计 25
 5.1.5光楔的设计 27
 5.1.6  1/2波片 28
5.2移相式同步剪切干涉仪原理 29
5.3双棱镜旋转方案的设计 31
 5.3.1侧板的设计 31
 5.3.2 滚筒的设计 32
 5.3.3 小滚筒的设计 33
 第六章 总结 34
 参考文献 35
 致  谢 37

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